| Veeco CPII Scanning Probe Microscope with 100 micron Scanner and On-axis Optical Microscope
- Performs contact, lateral force microscopy, tapping mode, phaseimaging, and Scanning Tunneling microscopy
- Capable of performing liquid imaging, force modulation, magnetic force, ,electric field, surface potential, scanning capacitance, scanning thermal microscopy, nanomanipulation, conductive AFM and nanolithography with additional hardware and/or software accessories
- Accepts samples up to 50mm diameter and 25mm thick
- Supports ScanMaster closed loop scan linearization and position control system
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Aspex Personal Scanning Electron Microscope (SEM)
- 5kV to 20 kV power
- 20X to 200kX continuous magnification
- Removable and interchangeable stage
- Secondary and backscatter imaging capable
- Auto focus, contrast and brightness
- Feature measurement capability
- Energy Dispersive X-ray analysis (EDX) system
- Motorized computer controlled x, y stage
- Motorized computer controlled tilt/rotate stage
- 4 segment multichannel backscatter detector
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Nikon Compound Microscope
- 5x to 100x objective lenses
- Brightfield, darkfield, and Nomarski image capable
- 3-level focus capability (rapid, course and fine) minimum 125mm of focus travel, built in scale for z-axis measurement
- Stage travel 6” x 4”
- Measurement stage with a minimum 100mm x 100mm stroke and .0005 mm resolution
- Rotating table
- 3 axis digital readout (DRO) capable of in or mm with 0.0005 mm resolution
- Digital camera with Nikon capture software able to save in multiple file formats and annotate images
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Phoenix X-ray Microscope
- Closed tube 100kV with high contrast 6” dual field image intensifier with high resolution CCD camera
- Auto positioning system (CNC) with a tilt and rotate unit
- Sample size of 28” x 22”, X-Y Scanning area of 24” x 18”
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Clean Room Equipment
- Perkin Elmer Sputter Machine capable of etching and multiple coating deposits to include copper, titanium, silicon oxide, and aluminum
- Rocye Ball and shear tester
- Ball Bonder
- OGI photolithography capable of 5” mask
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